Regis (Reactive Gas Inject System) is a chemical reacting system, using remote plasma technology to increase pump lifetime.
The latest generation Regis features a unique reaction chamber design that ensures process gases are efficiently reacted before entering the pump, extending pump lifetime to more than 300 days.
Compared to the previous generation Regis, the footprint has been reduced by 26.5%. The new Regis system coupled with harsh duty series dry vacuum pumps, provides maximum pump uptime and process stability for a series of processes.
Features and benefits:
- Low cost of ownership:
ReGIS extends the pump lifetime to 300 days or more
Optimized NF3 flow using FTIR studies to minimize CoO.
Reaction efficiency increased by 100% due to new reaction chamber design.
- Maximises tool uptime:
On-line continuous operation.
Reduced tool downtime due to frequent pump swap-outs.
- Fully enclosed system with cabinet extraction port included.
- PLC controlled:
Tool Signal Control ReGIS Plasma ignition capability.
Enhanced Security.
Full system monitoring.
- Enables process stability:
No loss in performance.
No changes in conductance.
Edwards Regis