Unparalleled vacuum performance and energy efficiency
Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency.
A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network.
IS XP
The On-Board® IS XP Cryopump delivers increased capacity for PVD applications toachieve maximum productivity while maintaining process transparency. At the sametime, it leverages the proven energy efficiency, consistent performance and low cost ofownership you have come to expect from the On-Board® IS.
- Provides capacity overhead for future process improvements
- Lower cost of ownership
- Increased up-time
- Intelligent “self-adjusting” technology for consistent vacuum performance
IS 320FX Cryopump
The On-Board® IS 320FX Cryopump, developed specifically to address the challenges oftoday's Ion Implant processes, provides enhanced hydrogen pumping speed andcapacity, while maintaining the quality, performance and reliability you have come toexpect.
- Specifically designed for Ion Implant applications
- Optimised for tool throughput
- Intelligent “self-adjusting” technology
- Lower cost of ownership
- Increased uptime
On-Board® IS 320F XVS Cryopump
Reach new levels of cryopump performance
The CTI-Cryogenics On-Board IS XVS 320F Cryopump maintains Edwards’ tradition of delivering the most reliable and best performing implant cryopumps on the market.
