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Search Edwards Vacuum
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    • Halbleiter-Services
    • Semiconductor Vacuum and Abatement Service Plans
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    Our Core subscription-based service plans help reduce operational costs and management time, allowing you to spend less time planning resources — all with the peace of mind that standard maintenance is covered. All our service plans are subscription-based to help you budget and spread your service costs throughout the year. Each service plan can be tailored to your facilities size, operating model, and production processes supported by our machines, allowing you to focus on your productivity goals. 

    Care is our spare parts plan. It delivers the parts required for maintenance, usually for one year of operation. Customers benefit from continuity of parts availability and the reliability of using genuine OEM parts. This plan is ideal for customers who service Edwards equipment using in-house personnel.

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    Maintain provides both parts and labour required to deliver an agreed maintenance schedule. This plan is ideal for all processes, combining qualified field service engineers and state-of-the-art remanufacturing from dedicated service centres. Maintain is ideal if you are struggling to maintain equipment in-house or using third party service providers. You will benefit from reduced administration costs, predictable budgeting, and less time spent planning resources... all while having the peace of mind that our global experts are taking care of your fleet. 

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    Perform delivers all the benefits of the Maintain plan, plus specific machine or component upgrades according to the agreed terms of the contract. Customers can subscribe to Perform to spread the investment cost of upgrading their fleet over the period of the contract. Perform is perfect for customers with vacuum equipment performance challenges that affect wafer production.

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    Plan Features

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    Care

    Spare parts plan
    • One single purchase order and monthly billing
    • Fixed supply of parts for standard maintenance used on site annually
       
    • Basic operational support provided by our team of experts
       
    • The plan can be enhanced with chargeable options at additional cost, including training and troubleshooting by our service teams
    maintain

    Maintain

    Parts and labour for standard maintenance
    • One single purchase order and monthly billing
    • Preventative and routine maintenance activities, including parts and labour required for each activity
    • Maintenance performed on site by our field service team for Abatement, or at our Service Technology Centres for Dry, Turbo, and Cryogenic Pumps
    • Troubleshooting and operational support provided by our team of experts
    • The plan can be enhanced with chargeable options at additional cost, including service exchange, upgrades, and inventory management
    Perform

    Perform

    Standard maintenance with upgrades included
    • One single purchase order and monthly billing
    • Preventative and routine maintenance activities, including parts and labour required for each activity
    • Maintenance performed on site by our field service team for Abatement, or at our Service Technology Centres for Dry, Turbo, and Cryogenic Pumps
    • Troubleshooting and operational support provided by our team of experts
    • Can include specific upgrades or improvement components according to the contract.
    • Possible to customise the plan with additional options
    • One single purchase order and monthly billing
    • Fixed supply of parts for standard maintenance used on site annually
    • Basic operational support provided by our team of experts

    Request a consultation to find your perfect service plan

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    One single purchase order and monthly billing

    line

    Fixed supply of parts for standard maintenance used on site annually

    Basic operational support provided by our team of experts

    The plan can be enhanced with chargeable options at additional cost, including training and troubleshooting by our service teams

    The plan can be enhanced with chargeable options at additional cost, including training and troubleshooting by our service teams

    One single purchase order and monthly billing

    line

    Preventative and routine maintenance activities. This includes the parts and labour required for each activity

    Maintenance performed onsite by our field service team for Abatement, or at our Service Technology Centres for Dry, Turbo, and Cryogenic Pumps

    Troubleshooting and operational support provided by our team of experts

    The plan can be enhanced with chargeable options at additional cost, including service exchange, upgrades and inventory management

     

    One single purchase order and monthly billing

    line

    Preventative and routine maintenance activities. This includes the parts and labour required for each activity

    Maintenance performed onsite by our field service team for Abatement, or at our Service Technology Centres for Dry, Turbo, and Cryogenic Pumps

    Troubleshooting and operational support provided by our team of experts

    Can include specific upgrades or improvement components according to the contract

    Spread the upgrade cost over the period of the subscription

    Possible to customise the plan with additional options