On-board IS Cryopumps

Innovative cryogenics technology delivering high efficiency

Unparalleled vacuum performance and energy efficiency

 A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver highest uptime, best productivity, and lowest overall cost of ownership of any cryopump systems available today, backed by the Brooks highly responsive global service and support network.


Key Features

 
  • Patented distributed control system monitors and constantly adjusts individual elements of the cryopump system
  • Maintains optimal system-wide vacuum performance, delivering exceptional process consistency
  • Quickest regenerations in single and multi-pump configurations
  • Low consumption of energy and cooling water with no compromise in vacuum performance
  • Easy system integration
  • Fast production installation
  • Enhanced remote monitoring for both preventive and predictive maintenance

The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today’s Ion Implant processes, provides enhanced hydrogen pumping speed and capacity while maintaining all the quality, performance and reliability benefits you’ve come to expect from the On-Board® IS 320FE cryopump. 

  • Specifically designed for ion implant applications
  • Optimized for tool throughput
  • Intelligent “self adjusting” technology
  • Lower cost of ownership
  • Increased uptime

 

The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy effi ciency, consistent performance and low cost of ownership you’ve come to expect from the On-Board® IS. 

  • Provides capacity overhead for future process improvements
  • Lower Cost of Ownership
  • Increased Up-Time
  • Intelligent “Self Adjusting” Technology for Consistent Vacuum Performance