World standard for reliability and performance
The Edwards CTI-Cryogenics On-Board range of cryogenic vacuum pumps, speed integration and improve system operation.
They deliver superior up-time and consistent performance, with fully integrated controls and supporting peripherals. Rely on them to increase overall tool productivity and up-time.
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.
Cryopumps, water pumps and compressors