Cryopumps

Superior performance and increased tool uptime

World standard for reliability and performance

From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology

Key Features


  • Fast Regen™ capability that extends cryopump performance between regenerations

  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration

  • An  embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability

  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.


To see our contact list see Cryogenics.