The MicroTIM provides an EtherCAT interface for Edwards dry pumps.
For more information on installing and operating the interface please refer to the instruction manual supplied with the product.
Roughing Pump |
Description of Change |
|
| ESI File Name | Edwards Roughing Pump D37363610I.xml |
Modified Sm MinSize to 128 to meet Conformance 7000.2 Annex 5003 requirement of Sm MinSize>=128. Updated for CTT 2.1.0. |
| Compatible MicroTIM Firmware | D37363605D | |
| Common Device Profile | ETG5003-1 | |
| CDP Functional Generation Number | 2 | |
| Specific Device Profile | ETG5003-2050 | |
| SDP Functional Generation Number | 2 | |
| Issue Date | 22nd January 2019 |
|
- Roughing Pump 7.9 kB, ZIP