The MicroTIM provides an EtherCAT interface for Edwards dry pumps.
For more information on installing and operating the interface please refer to the instruction manual supplied with the product.
| Roughing Pump | Description of Change | |
| ESI File Name | Edwards Roughing Pump D37363610I.xml | Modified Sm MinSize to 128 to meet Conformance 7000.2 Annex 5003 requirement of Sm MinSize>=128. Updated for CTT 2.1.0. | 
| Compatible MicroTIM Firmware | D37363605D | |
| Common Device Profile | ETG5003-1 | |
| CDP Functional Generation Number | 2 | |
| Specific Device Profile | ETG5003-2050 | |
| SDP Functional Generation Number | 2 | |
| Issue Date | 22nd January 2019 | |
- Roughing Pump 7.9 kB, ZIP