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Search Edwards Vacuum
EOS2000i eosi-oil-sealed-rotary-screw

The MicroTIM provides an EtherCAT interface for Edwards dry pumps.

For more information on installing and operating the interface please refer to the instruction manual supplied with the product.

Roughing Pump
EtherCAT MicroTIM D37363000

Description of Change

ESI File Name

Edwards Roughing Pump.xml

  • Optimised for next generation dry pumps for improved performance and efficiency.
  • Added functionality for iXL200 Twin Core pumps.
Compatible MicroTIM Firmware D37363605E
Common Device Profile ETG5003-1
CDP Functional Generation Number 2
Specific Device Profile ETG5003-2050
SDP Functional Generation Number 2
Issue Date

4 September 2025