The MicroTIM provides an EtherCAT interface for Edwards dry pumps.
For more information on installing and operating the interface please refer to the instruction manual supplied with the product.
Roughing Pump |
Description of Change |
|
| ESI File Name | Edwards Roughing Pump.xml |
|
| Compatible MicroTIM Firmware | D37363605E | |
| Common Device Profile | ETG5003-1 | |
| CDP Functional Generation Number | 2 | |
| Specific Device Profile | ETG5003-2050 | |
| SDP Functional Generation Number | 2 | |
| Issue Date | 4 September 2025 |
|
- Roughing Pump.zip 8.2 kB, ZIP