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EOS2000i eosi-oil-sealed-rotary-screw

The MicroTIM provides an EtherCAT interface for Edwards dry pumps.

For more information on installing and operating the interface please refer to the instruction manual supplied with the product.

Roughing Pump
EtherCAT MicroTIM D37363000

Description of Change
ESI File Name

Edwards Roughing Pump D37363610I.xml

Modified Sm MinSize to 128 to meet Conformance 7000.2 Annex 5003 requirement of Sm MinSize>=128. Updated for CTT 2.1.0.
Compatible MicroTIM Firmware D37363605D
Common Device Profile ETG5003-1
CDP Functional Generation Number 2
Specific Device Profile ETG5003-2050
SDP Functional Generation Number 2
Issue Date

22nd January 2019