Residual Gas Analysers

The perfect balance of high end performance and accessibility

Edwards RGA residual gas analysers

Our new RGA includes two variants: both come with simple and effective operation assuring high performance and efficiency  

For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.

PRA primary gas analyser

Delivering the perfect balance of high end performance and accessibility.

  • Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.
  • The PRA is the perfect starting point for analysing your processes.

WRA wide range residual gas analyser

Top of the line models, with market leading specifications.

  • Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes. 
  • This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.

Total pressure measurement

for full process control

Dual filament

for highest reliability and up-time

On unit display

for basic measurements without a PC

Customer replaceable parts
Degas function
Protection of Ion source and EM
RGAs do analysis of gases and their composition, this is needed for:

  • Leak detection and identification
  • Find and identify contaminants 
  • Verify gas purity
  • Product/process quality assurance
  • Process & equipment diagnostics and control
  • Optimize process performance and yield

The perfect solution in a wide range of applications:

  • Semiconductor processes
  • Thin-film and display
  • Vacuum heat treatment
  • Vacuum freeze drying
  • Research & development
  • High energy physics