PRA & WRA RGA - Datasheet
Residual Gas Analysers
The perfect balance of high end performance and accessibility
RGA residual gas analysers
Our range of Residual Gas Analysers comes with three variants: whatever the one you select they are all simple and effective to operate, give you the comfort of a high performing and efficient RGA by your side.
Unique Benefits
All RGAs are equipped with a dedicated and easy to use software
It allows you to track your process in real-time from your laptop and do detailed analysis of up to 16 different units.
For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.
RGAs do analysis of gases and their composition, this is needed for:
- Leak detection and identification
- Find and identify contaminants
- Verify gas purity
- Product/process quality assurance
- Process & equipment diagnostics and control
- Optimize process performance and yield
The perfect solution in a wide range of applications:
- Semiconductor processes
- Thin-film and display
- Vacuum heat treatment
- Vacuum freeze drying
- Research & development
- High energy physics
PRA primary gas analyser
Delivering the perfect balance of high end performance and accessibility.
- Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.
- The PRA is the perfect starting point for analysing your processes.
WRA wide range residual gas analyser
Top of the line models, with market leading specifications.
- Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes.
- This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.
eRGA1 Residual Gas Analyser System
- Precise gas analysis with customizable options for differing pressures. Its compact design integrates an Edwards PRA/WRA Residual Gas Analyser and a T-station 85 turbomolecular pumping station.
- Choose from multiple inlet options for flexibility in connecting to any process. Ideal for leak detection, contaminant identification, gas purity verification, and process diagnostics.
- With user-friendly software and tabletop configuration, it's easy to use.
- Suitable for various applications and markets, the eRGA1 ensures accurate analysis with reliability and flexibility.
Experience the power of gas analysis with the eRGA1 system.
eRGA1 Residual Gas Analyser Orifice and Bypass
eRGA1 Residual Gas Analyser UHV High Conductance Valve
eRGA1 Residual Gas Analyser UHV Leak valve
