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Residual Gas Analysers

The perfect balance of high end performance and accessibility

Residual gas analysers

RGA residual gas analysers

Our range of Residual Gas Analysers comes with three variants: whatever the one you select they are all simple and effective to operate, give you the comfort of a high performing and efficient RGA by your side.

Unique Benefits

Total pressure measurement

for full process control

Dual filament

for highest reliability and up-time

On unit display

for basic measurements without a PC

Customer replaceable parts
Degas function
Protection of Ion source and EM

All RGAs are equipped with a dedicated and easy to use software

It allows you to track your process in real-time from your laptop and do detailed analysis of up to 16 different units.

For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.

RGAs do analysis of gases and their composition, this is needed for:

  • Leak detection and identification
  • Find and identify contaminants
  • Verify gas purity
  • Product/process quality assurance
  • Process & equipment diagnostics and control
  • Optimize process performance and yield

The perfect solution in a wide range of applications:

  • Semiconductor processes
  • Thin-film and display
  • Vacuum heat treatment
  • Vacuum freeze drying
  • Research & development
  • High energy physics

PRA primary gas analyser

Delivering the perfect balance of high end performance and accessibility.

  • Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.
  • The PRA is the perfect starting point for analysing your processes.
Residual gas Analyser RGA

WRA wide range residual gas analyser

Top of the line models, with market leading specifications.

  • Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes.
  • This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.
Residual gas analyser RGA

eRGA1 Residual Gas Analyser System

  • Precise gas analysis with customizable options for differing pressures. Its compact design integrates an Edwards PRA/WRA Residual Gas Analyser and a T-station 85 turbomolecular pumping station.
  • Choose from multiple inlet options for flexibility in connecting to any process. Ideal for leak detection, contaminant identification, gas purity verification, and process diagnostics.
  • With user-friendly software and tabletop configuration, it's easy to use.
  • Suitable for various applications and markets, the eRGA1 ensures accurate analysis with reliability and flexibility.

Experience the power of gas analysis with the eRGA1 system.

Edwards employee s standing in corridor smiling

Read more on our offerings in Service Solutions