Reach new levels of cryopump performance
The CTI-Cryogenics On-Board IS XVS 320F Cryopump maintains Edwards’ tradition of delivering the most reliable and best performing implant cryopumps on the market.
The On-Board® 320F XVS cryopump is designed to deliver the highest hydrogen pumping performance for improved process yield and throughput, offering the perfect answer to today’s Ion Implant applications challenges. The intelligent system control integrated in the cryopump ensures better process quality, vacuum consistency, and uptime, while providing real-time system information for optimum control of array temperatures. Vacuum quality is enhanced by automatic adaptation to changing thermal/gas loading conditions.
Features and benefits
Stable vacuum performance:
- Reduced H2 Pumping Speed Variation betweenRegenerations
- Reduced Impact to H2 Pumping Speed due to PhotoresistContamination
- Optimized stable array temperatures
Enhanced vacuum performance:
- High H2 Pumping Speed-15,500 L/S
- High H2 Capacity – 40 STD-L
System compatibility:
- On-Board IS Cryopump systems
- IS-1000, IS-2000V, IS-1800 XVS Compressors
