Supporting our customers' productivity
Maximising SubFab availability
In today’s fast-moving, connected world, we understand the need to maximise our customers' productivity. We do this by ensuring their technology is first to market, while continuing to strive to reduce the risk and environmental challenges the manufacturing process can bring.
Edwards integrated solutions appraise the whole vacuum and exhaust management needs of the customer, based on our global experience, with the most advanced technologies in the sector. Our integrated systems provide the advantages of product and service repeatability and space saving. They bring improved productivity, safety and environmental reassurance. Our integrated systems also carry direct benefits of faster install and set up speed, economies of scale and enhanced safety.
EZENITH offers an advanced portfolio of systems providing fully integrated vacuum and exhaust management solutions for all of your semiconductor processes applications. EZENITH systems are unique in offering:
- Process-Centric Vacuum & Exhaust Management
- Complete Integration of Components
- Support of each function with a powerful, Integrated Control Interface
- Designed for Efficient use of Space - for Savings of up to 70%
- Full Internal Distribution, regulation and monitoring of services reducing utility hook-up by over 60% while ensuring smooth and reliable operation
With just a pump and a gas abatement device, you still are not ready to run your process. You will need to connect the pump exhaust, connect up your line heaters where required, run your water, purge and electrical lines, and then get all of your control signals ready. You will also have to consider double-enclosure, gas leak detection, and how you want to conduct leak checks after your tool maintenance. All of these things will cost you design time and money. We understand the problem so we have developed integrated, process-specific solutions.
Our integrated systems are already pre-designed for most semiconductor processes. The exhaust heaters are set for the correct temperature to minimize cost and maximise up-time. We put leak check ports and gate valves where they are required. The whole system is enclosed and, most importantly, you only need to provide one of each of the required utilities. We distribute the gases, water, electricity, and control signals where they are needed and create a ready-to-go system.