On Chamber Solutions

Low vibration and zero maintenance

If you need consistent, reliable performance with zero maintenance, our range of STP Maglev Turbomolecular Pumps sets the standard. The rotor is entirely suspended by magnetic bearings - perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.

Advanced High Throughput Series

The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:

Compact footprint
Throughput speeds from 300 l/s to 4,500 l/s
Throughput up to 6 slm and increased H2, N2 and Ar performances

Fully Integrated Controller & Power Supply

This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:

Reduced footprint, saving valuable fab real estate, installation time and cost
On-board power supply reduces energy consumption by up to 32% at high gas flows
Operating with throughput speeds from 300 l/s to 4,500 l/s

Ultra High Vacuum

The Ultra High Vacuum series offers unrivalled reliability, performance, cleanliness and class-leading low vibration levels:

D.C. power eliminates the need for batteries
Half rack controller features auto-tuning and advanced diagnostic features
Speeds from 300 l/s to 1,000 l/s and <10-10 mbar ultimate pressure CF flange
“C” version for harsh process is also available

Ultra High Vacuum Low Vibration Series

The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.

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STP Maglev Turbomolecular Pumps

On Chamber Solutions

Advanced High Throughput Series