Diffusion Pumps

Next generation high throughput diffusion pumps

The ideal solution for demanding industrial applications

Performance Stability

The optimised pumping speed and stable high throughput is ideal for the critical Coating, Metallurgy, Heat Treatment and R & D applications.

Reliability and increased productivity

The smart temperature control and on board sensors ensure minimum load with longer lifetime for heaters and oil. The non-wear components and easy-change heater cartridges ensure extended intervals between service and maintenance.

Energy Efficiency Controller

The Energy Efficiency Controller enables ease of use and operating convenience along with effective monitoring with USB and Ethernet interface. The innovative heating design provides a faster warm up time and enables up to 30% energy savings.

Technical specifications

    nHT10 nHT16 nHT20 nHT32 nHT35    
    ANSI  ISO ANSI  ISO ANSI  ISO ANSI  ISO ANSI ISO
Inlet connection    10˝ ANSI  320 ISO-K  16˝ ANSI 500 ISO-K 20˝ ANS 630 ISO-K  32” ANSI 800 ISO-F 35˝ ANSI 1000 ISO-F
Backing connection   2˝ ANSI 63 ISO-K 3” ANSI  100 ISO-K 4˝ ANSI 160 ISO-K 6” ANSI 200 ISO-K 6” ANSI 200 ISO-K
Pumping speed*
Nitrogen <10-4 mbar
l/s 3,000 6,800 10,000  21,000 30,000
Pumping speed
Argon <10-4 mbar
l/s 2,750 6,350 9,000 18,000 26,000
Pumping speed
Helium <10-4 mbar
l/s 4,500 9,500 17,000 30,000 42,000
Gas throughput mbar l/s 8 11 17 36 36
Operating range mbar < 10-1 to 10-7 < 10-1 to 10-7 < 10-1 to 10-7 <10‐2 to 10‐7 < 10-2 to 10-7
Ultimate pressure
(Edwards 704)
mbar < 5 x 10-7 < 5 x 10-7  < 5 x 10-7 < 10‐6  < 10-6
Critical backing pressure
(Edwards 704)
mbar 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1 5 x 10-1
Heating power kW 3.6 7.2 10.8 21.6 21.6
Heating cartridges qty 3 6 9 18 18
Warm-up period min < 15 < 15 < 25 < 25 < 25
Weight kg 105  185 210 570 720
Recommended oil   Edwards 704
Oil l 3.0-4.0 3.5-4.5 5.5-7.0 9.0-11.0 9.0-11.0
Recommended holding pump   E2M40 E2M40 E2M40 E2M80 E2M80
Recommended backing pump   nES200, E2M80,
EDS200, EH1200
nES200, E2M175,
EDS200, EH1200 
nES300, E2M175,
EDS300, EH1200
nES630, E2M275,
GXS450, EH2600
nES630, E2M275,
GXS450, EH2600

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