Diffusion Pumps

Next generation high throughput diffusion pumps

The ideal solution for demanding industrial applications

Performance Stability

The optimised pumping speed and stable high throughput is ideal for the critical Coating, Metallurgy, Heat Treatment and R & D applications.

Reliability and increased productivity

The smart temperature control and on board sensors ensure minimum load with longer lifetime for heaters and oil. The non-wear components and easy-change heater cartridges ensure extended intervals between service and maintenance.

Energy Efficiency Controller

The Energy Efficiency Controller enables ease of use and operating convenience along with effective monitoring with USB and Ethernet interface. The innovative heating design provides a faster warm up time and enables up to 30% energy savings.

Technical specifications

    NHT20 NHT35
    ANSI ISO ANSI ISO
Inlet connection   20" ANSI 60 ISO-K 35" ANSI 1000 ISO-K
Backing connection   4" ANSI 160 ISO-K 6" ANSI 200 ISO-K
Pumping speed*
Nitrogen<10-4mbar
l/s 10,000 30,000
Pumping speed
Argon <10-4 mbar
l/s 9,000 26,000
Pumping speed
Helium <10-4 mbar
l/s 17,000 42,000
Gas Throughput mbar l/s 18 33
Operating range mbar <10-2 - 5 x 10-7 < 10-2 - 5 x 10-7
Ultimate pressure (Edwards 704) mbar < 5 x 10-7 < 5 x 10-7
Critical hacking pressure (Edwards 704) mbar 5 x 10-1 5 x 10-1
Heating power kW 10.8 21.6
Heating cartridges qty 9 18
Warm-up period min < 25 < 30
Weight kg 210 720
Recommended oil   Edwards 704 Edwards 704
Oil l 5.5-7.0 9.0 - 11.00
Minimum backing pump displacement for maximum throughput m3h-1 135 250
Recommended backing pump   GXS160, E2M175 GXS250, E2M275
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