Atlas

ATLAS - unrivalled abatement performance

Atlas abatement technology: a range of combustion gas abatement solutions - specific to your process:

  • Atlas TCS for common CVD gases (NF3/F2)
  • Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes
  • Atlas Kronis for the low-k CVD gases in next-generation processes
  • Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFCs)
  • Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD

Atlas™ systems have low fuel consumption compared with previous-generation gas abatement devices. We use proven Alzeta™ inward-fired combustor technology to achieve a significantly reduced cost of ownership. With one to six inlets with a number of options, including a temperature management system (TMS), Atlas systems can treat a flow capacity of up to 1,200 slm. They are designed to be easy to use and enable more efficient maintenance.

Edwards' inward-fired combustion technology

Used by most major semiconductor manufacturers, the inward-fired combustor has become a world standard in gas abatement since 1994.

Our unique combustion technology operates with a uniform combustion temperature. This ensures very low background emissions, and the inward flow of gas prevents process material contact with the chamber walls, which minimises the blockage by solids. The exclusive composition of the combustor material ensures superior resistance to corrosion and helps to provide the Atlas with unrivalled reliability and safety.

At our state of the art environmental innovation centre, we have process tuned solutions for outstanding performance, field proven and third party verified. Abatement DRE’s typically extend beyond global and local legislation:

    SiH4 and other Halides below TLV

    NF3 : >99% / <TLV

    F2 : : >99% / <TLV

    CF4 : >90%

    Other PFCs : >99%

With an expansive install base, unparalleled global applications team and service support, we can offer the best solution designed for your process needs. Get in touch with our team and we can work together for the ultimate resolution.