Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use.
Provides outstanding reliability, excellent powder handling and corrosion resistance.
Atlas abatement technology - specific to your process:
Atlas™ systems have low fuel consumption compared with previous-generation gas abatement devices and use proven Alzeta™ inward-fired combustor technology to achieve a significantly reduced cost of ownership. With one to six inlets with a number of options, including a temperature management system (TMS), they can treat a flow capacity of up to 600 slm and they offer enhanced ease-of-use and more efficient maintenance.
Used by most major semiconductor manufacturers, the inward-fired combustor has become a world standard in gas abatement since 1994. This unique combustion technology operates with less fuel, producing a clean, uniform burn chamber.
Low temperature combustion ensures very low NOx emissions and the inward flow of gas prevents process material contact with the chamber walls, minimizing blockage by solids. Ceramic construction material is used to ensure the combustors’ immunity to corrosion and unrivalled reliability and safety.
Outstanding performance, DRE’s typically:
SiH4 and other Halides below TLV
NF3 : >99% / <TLV
F2 : : >99% / <TLV
CF4 : >90%
Other PFC’s : >99%