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Enabling innovative people

We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.

We are application experts who understand our customers’ processes and develop solutions focused on maintaining productivity and lowering risk.

Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.

Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance often conflicting requirements. These include lower cost of ownership through reduced environmental emissions and extended product lifetimes, with a reduction in ongoing service costs.


Find out more about our customized Service Solutions