00.02 | We are changing the paradigm of how the subfab operates, is equipped and serviced.
Optimising space efficiency with Ganymede: Smaller footprint, greater impact
As the semiconductor industry continues to advance, the cost of Fab space has skyrocketed, driving manufacturers to maximise the number of tools in the available space. Traditionally, subfab equipment is expected to fit within the tool’s footprint projected from the fab above. This presents a challenge, as the physical size of a vacuum pump is directly related to its pumping capacity, creating a conflict between the desire for smaller pumps and the need for higher capacity and speed.
To meet these growing demands, Ganymede has been engineered to be 30% smaller than legacy pumps, offering a groundbreaking solution for subfab managers looking to free up space without compromising performance. By reducing the pump footprint, Ganymede allows manufacturers to capitalise on valuable Fab real estate, enabling the integration of more tools within the same space.
Key benefits of Ganymede’s smaller footprint:
• Increased throughput: The compact design of Ganymede allows for more efficient use of space, enabling the addition of more tools in the Fab, which drives higher throughput and productivity
• Reduced CO2 emissions: Ganymede’s smaller size and elevated performance contribute to lower energy consumption, helping manufacturers reduce their carbon footprint and meet sustainability goals
• Maintenance efficiency: Despite its reduced size, Ganymede is designed for ease of service, ensuring that maintenance tasks can be completed quickly and safely, without the complications often associated with stacked or compacted systems.
The space-saving advantage
To keep pace with reductions in tool size, vacuum pump footprints must shrink by 20%-30%. Ganymede meets this challenge head-on, providing a solution that not only conserves space but also delivers the pumping capacity and speed required to maintain top-level performance.
For subfab managers seeking to optimise both performance and the use of space, Ganymede offers a next-generation solution that aligns with the demands of today’s semiconductor manufacturing environment.
Discover the space-saving benefits of Ganymede and how it can help you increase throughput and reduce CO2 emissions.
Learn more about project ganymede
