Your browser is not supported

Stai utilizzando un browser che non è più supportato. Per continuare a visitare il nostro sito Web, scegli uno dei seguenti browser supportati.

Residual-gas-analysers-fullsize

Edwards RGA residual gas analysers

Our RGA includes two variants: both come with simple and effective operation assuring high performance and efficiency   

For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.

PRA primary gas analyser

Delivering the perfect balance of high end performance and accessibility.

  • Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.
  • The PRA is the perfect starting point for analysing your processes.

WRA wide range residual gas analyser

Top of the line models, with market leading specifications.

  • Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes. 
  • This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.

/
Total pressure measurement

for full process control

Dual filament

for highest reliability and up-time

On unit display

for basic measurements without a PC

Customer replaceable parts
Degas function
Protection of Ion source and EM
RGAs do analysis of gases and their composition, this is needed for:

  • Leak detection and identification
  • Find and identify contaminants 
  • Verify gas purity
  • Product/process quality assurance
  • Process & equipment diagnostics and control
  • Optimize process performance and yield

The perfect solution in a wide range of applications:

  • Semiconductor processes
  • Thin-film and display
  • Vacuum heat treatment
  • Vacuum freeze drying
  • Research & development
  • High energy physics