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Edwards Cryo-Torr Cryopump

Cryo-Torr Cryopumps

Clean, reliable, high-speed pumping for critical vacuum process applications

Clean and reliable

Providing low operating costs and fast, easy maintenance, these cryopumps deliver high reliability and bottom-line performance backed by responsive service you can count on. For added flexibility, you can add your own customised controls and supporting peripherals to meet your specific application needs.

 

Key Features

  • Providing low operating costs 
  • Fast, easy maintenance
  • High reliability 
  • Bottom-line performance

Cryo-Torr Pump Model     8 8F 10 10F 400
Configuration     Straight Flat Straight Flat Straight
Vacuum Flange ID (Metal Seal, ANSI, ISO)     200 mm 200 mm 290 mm 300 mm 400 mm
Gas Pumping Speeds              
  Water Liters/Sec 4,000 4,000 9,000 9,500 16,000
  Air Liters/Sec 1,500 1,500 3,000 3,600 6,000
  Hydrogen Liters/Sec 2,500 2,200 5,000 6,000 5,000
  Argon Liters/Sec 1,200 1,200 2,500 3,000 5,000
Gas Capacities              
  Hydrogen Standard Liters 17 8 24 24 15
  Argon Standard Liters 1,000 1,000 2,000 2,000 2,500
Throughput              
  Argon Sccm 700 700 1,500 1,500 500
  Argon Torr-Liters/Sec 9 9 19 19 6
Crossover   Torr-Liters 150 150 300 300 300
Cooldown Time              
    60 Hertz 90 min 90 min 100 min 100 min 150 min
    50 Hertz 110 min 110 min 120 min 120 min 180 min
Cryopump Weight              
    Lbs 45 42 85 90 160
    Kg 20 19 39 41 73