Burgess Hill, July 1, 2019: Atlas Copco Group has completed the acquisition of Brooks’ Semiconductor Cryogenics Business that was announced on August 27, 2018.
The acquisition includes cryo pump operations located in Chelmsford, USA and Monterrey, Mexico, a worldwide sales and service network, and Brooks Automation’s 50% share of Ulvac Cryogenics, Inc., (UCI).
The cryogenic business, which is headquartered in Chelmsford, MA, has about 400 employees and is a market leader in advanced cryo pumps and cryo chillers for the semiconductor and related industries through its CTI-Cryogenics and Polycold product lines. The acquired business will significantly expand Edwards’ offering to customers in the semiconductor and general vacuum industries. The acquisition complements Edwards’ existing technology portfolio with a new range of high vacuum pumps that optimise the removal of water vapour and hydrogen, which is critical to many semiconductor and industrial processes.
For more information: https://www.edwardsvacuum.com/en/our-markets/semiconductor-and-electronics/cryogenics