On Chamber Solutions
Low Vibration and Zero Maintenance
If you need consistent, reliable performance with zero maintenance, our range of STP Maglev Turbomolecular Pumps sets the standard. The rotor is entirely suspended by magnetic bearings – perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Advanced High Throughput Series
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
- Compact footprint
- Throughput speeds from 300 l/s to 4500 l/s
- Throughput up to 6 slm and increased H2, N2 and Ar performances.
- Fully Integrated Controller & Power Supply
- Ultra High Vacuum
- Ultra High Vacuum Low Vibration Series
Fully Integrated Controller & Power Supply
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
- Reduced footprint, saving valuable fab real estate, installation time and cost
- On-board power supply reduces energy consumption by up to 32% at high gas flows
- Operating with throughput speeds from 300 l/s to 4500 l/s.
Ultra High Vacuum
The Ultra High Vacuum series offers unrivalled reliability, performance, clean¬liness and class leading low vibration levels.
- D.C. power eliminates the need for batteries
- Half rack controller features auto-tuning and advanced diagnostic features
- Speeds from 300 l/s to 1000 l/s and <10-10 mbar ultimate pressure CF flange
- “C” version for harsh process is also available
Ultra High Vacuum Low Vibration Series
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
- Reduced footprint, saving valuable fab real estate, installation time and cost
- On-board power supply reduces energy consumption by up to 32% at high gas flows
- Operating with throughput speeds from 300 l/s to 4500 l/s.
The Ultra High Vacuum series offers unrivalled reliability, performance, clean¬liness and class leading low vibration levels.
- D.C. power eliminates the need for batteries
- Half rack controller features auto-tuning and advanced diagnostic features
- Speeds from 300 l/s to 1000 l/s and <10-10 mbar ultimate pressure CF flange
- “C” version for harsh process is also available
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.