iTrap® 

iTrap® is a compact, highly sensitive ion trap Fourier Transform mass spectrometer. It is an ideal tool for process analysis and inline process control. It can be used in R&D and production environments. iTrap supports you reliably in detecting the smallest traces of reaction byproducts or contamination, it helps you to investigate effectiveness of cleans and analyze chamber health.

A mass spectrum is measured in almost real time. With concentrations down to ppb levels or below, you can trace very small amounts of molecules in your process chamber. iTrap is a powerful tool in the hands of a researcher or process development engineer and can also be used as an intelligent sensor integrated and controlled by other process tool equipment.

Edwards iTrap convinces through: 

• Speed | Real time measurements possible, full spectrum in < 0.5 sec

• Sensitivity | ppb concentrations in < 1 sec 

• Compactness | Can be integrated with a process chamber. Standardized software interface ready for external chemicals. 

• Robustness against corrosives | Inert surface, No detectors. Withstands H2, Cl, F and other aggressive chemicals