Accelerate integration and improve system operation
Edwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation - known as the world standard for reliability and performance.
On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
| On-Board Cryopump Model | 4F | 8 | 8F | 10 | 10F | 250F | 400 | 500 |
| Pumping Speeds - litres/sec. | ||||||||
| Water Vapour | 1,100 | 4,000 | 4,000 | 9,000 | 9,500 | 6,500 | 17,500 | 30,000 |
| Air | 370 | 1,500 | 1,500 | 3,000 | 3,600 | 2,200 | 6,000 | 10,000 |
| Hydrogen | 370 | 2,500 | 2,200 | 5,000 | 6,000 | 3,200 | 12,000 | 12,000 |
| Argon | 310 | 1,200 | 1,200 | 2,500 | 3,000 | 1,800 | 5,000 | 8,400 |
| Capacity - std. litre | ||||||||
| Argon | 210 | 1,000 | 1,000 | 2,000 | 2,000 | 1,000 | 2,500 | 6,000 |
| Hydrogen (5x10-6 Torr) | 3 | 17 | 12 | 24 | 24 | 16 | 42 | 45 |
| Nominal Regeneration Time (cold to cold) | ||||||||
| First and Second Stage | 75 min | 2.5 hrs | 2.5 hrs | 2.5 hrs | 2.5 hrs | <3.3 hrs | 3 hrs | <3.8 hrs |
| Second Stage | <1 hr | <1 hr | <1 hr | <1 hr | <1 hr | <1.5 hrs | <1.5 hrs | - |
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