Gate Valves for Vacuum Systems
VAT Gate valves for high and overall leak tightness
Why choose a gate valve?
Gate valves offer a simple but innovative wedge, grease free sealing mechanism, of stainless steel construction and robust design.
These valves are especially suited to applications with high levels of process by-product in the gas stream, these are valves with a long service life and reliability in harsh environments.
BGV Manual Gate Valves
BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10‑8 mbar (1.2 x 105 to 1x10‑6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.
- Able to withstand 1.2 bar absolute in either direction. Avoids re‑start issues by keeping the pump running during maintenance.
- Stainless steel construction and robust design.
- Long service life and reliability in harsh environments
- Pneumatic solenoid and pre‑wired option.
- Pre‑configured simple ‘plug and play’ installation.
- Simple grease-free sealing mechanism. Minimises damage due to particulates in dusty processes.
BGV MK3 Pneumatic Gate Valves
The BGV Mk3 pneumatic gate valve works in the same way as the manual gate valve however the pneumatic valve has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position.
Each BGV Mk3 pneumatic valve is fitted with a 24V d.c. solenoid and pre‑wired plug for direct connection to your Edwards latest generation vacuum pump (iHH, iXL, iXM and GXS). This 15‑way D-sub socket plug offers a single point of connection for both power to the solenoid and activating LEDs from the reed switch position indicators. 15-way “D” socket cable and reed switch position indictors are optionally supplied with BGV valves. However, length of the cable is about 50cm and a longer extension cable is required to connect to a pump or local controller.
In order to connect the BGV Mk3 pneumatic valve to Edwards legacy products the BGV Mk2 TIM interface cable should be used. The functionality of the LEDs is not available on legacy products (iGX, GX or iQ and iH via the iTIM module) as the pumps do not provide the DC 24V power to activate LEDs. However, the basic function of valve positioning indicator works for open and close as no power is required, and it is triggered by the magnetic field.
- Able to withstand 1.2 bar absolute in either direction. Avoids re‑start issues by keeping the pump running during maintenance.
- Stainless steel construction and robust design. Long service life and reliability in harsh environments.
- Pneumatic solenoid and pre‑wired option.
- Pre‑configured simple ‘plug and play’ installation.
- Simple grease‑free sealing mechanism. Minimises damage due to particulates in dusty processes.
- Lock Out Tag Out (LOTO) versions are also available.
How do manual and pneumatic BGV gate valves work?
The simple but innovative wedge sealing mechanism, incorporating PEEK gliders, make the valve especially suited to applications with high levels of process by‑product in the gas stream:
- No oil, grease, or complex moving parts within the valve, removing the risk of damage to the mechanism due to contamination from process debris
- PEEK gliders provide no metal‑to‑metal contact and act to control the compression of the O-ring
- As the gate closes the O-ring brushes across the sealing surface briefly before it seals, helping to clean debris from the sealing surface thus giving a better seal
BGV Stainless Steel Gate Valve with LOTO Safety Feature
BGV LOTO pneumatic gate valves include all the benefits of the standard BGV range, with LOTO safety feature and low power.
BGV LOTO gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV valves are also ideal for other applications where a 1 bar differential at opening is desirable.
The unique Lock‑Out‑Tag‑Out (LOTO) safety mechanism allows personnel to freely work on the vacuum system without fear of the valve inadvertently opening. The valve is physically held closed using a pin to lock the valve shut preventing it from being opened. If there is a requirement for the valve to be locked shut, a lockout hasp can be inserted through the LOTO pin and padlocked.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10‑9 mbar (1.2 x 105 to 1x10‑7 Pa). BGV valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed.
The low power actuation requirement at just 1 W enables direct connection to Edwards latest generation dry pumps range without any additional external power supply and facilitates ‘plug and play’ simple installation.
Reed switches can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs to provide a visual display of the valve position. Each valve is fitted with a 24V d.c. solenoid and pre‑wired plug for direct connection to your Edwards latest generation vacuum pump. This 15‑way “D” socket plug offers a single point of connection for both power to the solenoid and the signal from the reed switch position indicators. 15‑way “D” socket cable and reed switch position indicators are optionally supplied with BGV valves. However, length of the cable is about 50cm and a longer extension cable is required to connect to a pump or a local controller.
In order to connect the BGV LOTO pneumatic valve to Edwards legacy products the BGV TIM interface cable should be used. The functionality of the LEDs is not available on legacy products as the pumps don’t provide the DC 24V power to activate LEDs.
How do BGV stainless steel gate valves with LOTO safety feature work?
The simple but innovative wedge sealing mechanism, incorporating PEEK gliders, make the valve especially suited to applications with high levels of process by product in the gas stream:
- No oil, grease or complex moving parts within the valve removing the risk of damage to the mechanism due to contamination from process debris
- PEEK gliders provide no metal‑to‑metal contact and act to control the compression of the O-ring
- As the gate closes the O-ring brushes across the sealing surface briefly before it seals, helping to clean debris from the sealing surface thus giving a better seal
- LOTO valves can be locked securely closed. Providing a safe working environment during maintenance
- Low power actuation at just 1 W. Direct connection to Edwards latest generation dry pump
- Able to withstand 1.2 bar absolute in either direction. Allowing the pump to continue running during maintenance
- Pneumatic solenoid and pre‑wired option. Pre‑configured simple ‘plug and play’ installation
- Stainless steel construction and robust design. Long service life and reliability in harsh environments
- Simple grease‑free sealing mechanism. Minimises damage due to particulates in dusty processes
When using BGV LOTO pneumatic valves
The BGV LOTO pneumatic valve can be plugged directly into our latest generation of dry vacuum pumps allowing full functionality. Latest generation products include: iXH, iXL, iXM and GXS pumps.
In order to connect the BGV LOTO pneumatic valve to our legacy products the BGV Mk2 TIM interface cable should be used. Legacy products include: iGX, GX (or iQ and iH via the iTIM module) pumps.
HVA Gate Valves for Ultra high vacuum and high baking temperature
GV Manual and Pneumatic Gate Valves
The GV range of stainless steel, bellows sealed gate valves is designed for applications requiring overall leak tightness and a minimum of hydrocarbon in the residual atmosphere.
These superior quality valves offer high vacuum integrity coupled with maximum conductance. The valves are available with flange options of ISO, CF (metal sealed) for applications at ultra high vacuum requiring increased bake-out temperatures.
The stainless steel valve bodies are vacuum brazed, a special process which includes a bake-out at 1100 ˚C. This eliminates any possibility of virtual leaks and ensures a product with low outgassing characteristics.
A laser welded stainless steel bellows effectively seals the actuator from the valve. The concept provides ease of servicing and allows the gate and linkage mechanism to be removed while the valve remains in situ.
- In situ removal of gate and linkage mechanism for easy servicing.
- Virtual leaks eliminated due to vacuum brazed manufacture.
- Electropolished finish inside and outside.
- Compact design with high conductance.
- Manual or pneumatic options.
- Microswitch position indicator as standard on pneumatic version suitable for magnetic fields.
- Long periods of use between maintenance.
- Low vibration and shock.
- Free choice of orientation.
- Wide range from 40 mm/1.56 inch bore up to 320 mm/12.48 inch bore.
- Flange options – ISO, CF (metal sealed)
- Vacuum brazed to 1100 ˚C to eliminate virtual leaks.