For a consistent, reliable performance
and zero maintenance, you can rely on Edwards STP Maglev Turbomolecular Pumps to
deliver every time.
Our first STP Maglev Turbomolecular Pumps were sold in 1983, we now have over 130,000 installations worldwide. 85% are operating on semiconductor process tools, where they demonstrate exceptional levels of performance and reliability.
STP Maglev Turbomolecular Pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the
pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing contact when rotor is rotated and no requirement for consequent pump maintenance.
Energy saving technologies have been incorporated into each design phase of the product development to ensure reduced power consumption and operation efficiency, with no compromise on quality or performance.
Flat Panel DisplayOur extensive range of STP Maglev Turbomolecular Pumps are designed to maximise substrate throughput and ultimate zero humidity process condition, while minimising power, footprint and weight.
LEDOur latest range of STP Maglev Turbomolecular Pumps are the “all-in-one” compact solution with low power for large volume, high-flow applications.
PhotovoltaicOur STP Maglev Turbomolecular Pumps are optimised to meet customer specific applications, with exceptional process gas handling, consistent performance and maximum reliability.
Semiconductor Processing The fully magnetically-levitated rotor has been designed to reduce the risk of contamination to the chamber and extend service intervals, making the STP Maglev Turbomolecular Pumps the reliable choice for your process tool.
High Throughput SeriesThe new “Advantage” series of
magnetically levitated turbo pumps have been designed to provide the highest
levels of throughput required by the next generation of semiconductor etch and
CVD processes. They have been developed, using continuous improvement
techniques, from the ultra-reliable, high performance H series of products.
Their advanced rotor technology and 3D blade design, combined with selection of
the best materials has allowed the creation of the next generation of high
throughput turbo pump inside the same footprint as many of the existing models.
The range contains pumps with throughput speeds from 300 l/s to 4500 l/s, with
throughput up to 6 slm and increased H2, N2 and Ar
Integrated Controller & Power SupplyThis really is the all-in-one turbo pump
solution, offering great features and savings.
The fully-integrated controller eliminates the connection cable and rack
conventionally required with a non-integrated controller, this helps reduce
footprint, saving valuable fab real estate, as well as installation time and
cost. In addition, the on-board controller incorporates a small power supply,
which compared to existing products, delivers approximately 32 percent
reduction in energy consumption at high gas flows. The range operates with
throughput speeds from 300 l/s to 4500 l/s meaning this is an option for many
processes and applications.
High Vacuum The Ultra High Vacuum series of
magnetically levitated turbomolecular pumps are the products of choice for many
semiconductor, surface science or high energy physics industries. They offer
unrivalled reliability, performance, cleanliness and class leading low
vibration levels. The pumps are all D.C. powered, eliminating the need for
batteries, they use a half rack controller which features auto-tuning and
advanced diagnostic features. The range includes pumps with speeds from 300 l/s
to 1000 l/s and <10-10 mbar ultimate pressure (CF flange), plus a
“C” version for harsh process is also available.
High Vacuum Low Vibration SeriesThe Ultra High Vacuum Low Vibration
version incorporates all the features of the Ultra High Vacuum turbomolecular
pump, plus a built-in vibration isolator will give ultra-low vibration
Select the right controller to partner
with your STP Maglev Turbo Pump by selecting from of our range of SCU control Units.
SCU-350 Control UnitThe SCU-350 control unit is a EU-RoHS
compliant controller for small sized turbo pumps. It is fully compatible with
the current control unit models, but has an improved vibration property at low
frequency range. It also has lower input
voltage, which contributes to a reduction in electric capacity and tool power
consumption. The SCU-350 has improved noise immunity and is equipped with
universal voltage function for operation with supply voltage from 100-240 VAC
SCU-800 Control UnitThe SCU800 turbo pump control unit is a
fully digital controller, and has perfect compatibility for middle sized pumps.
New AVR (Auto vibration reduction) technology achieves a further reduction in
vibration levels, and the advanced pre-maintenance call function provides
advanced notice of precise maintenance time.
SCU-XL800 Control UnitThe fully-digital SCU-XL800 turbo pump
control unit is compatible with STP turbo pumps ranging from 600 l/s to 1300
l/s. The SCU-XL800 reduces the vibration
levels of less than 300 Hz which are difficult to eliminate with mechanical
vibration isolators. It achieves sub-nanometer vibration levels across the
frequency spectrum using advanced Digital Signal Processor (DSP) techniques.
The controller is suitable for use with electron microscopy, metrology and
lithography systems where low-vibration is critical to the application.
SCU-1600 Control UnitThe
fully digital SCU-1600 turbo pump control unit is compatible with STP turbo pumps
ranging from 2000 l/s to 4500 l/s. It provides reliability, enhanced
communication and pump compatibility with reduced back-up unit requirements and
minimised overall cost of ownership.
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