Spectra

Spectra - meeting your environmental needs

Abatement


• Unique 4-stage combustion technology


• Efficient SiH4 abatement


• High H2 flow abatement capacity


• Excellent management of high flows of NF3 / F2


• High NH3 abatement capacity


• Modular design of abatement and particulate management


• 80% powder removal efficiency


Acid gas scrubbing


• Integrated wet scrubber


• Water Recirculation Unit to optimise water consumption


Powder Capture


Spectra ZW2 – water cooled abatement with particulate removal


• Modular Wet Electrostatic Precipitator (WESP)


• Removal of 99% particulate


• High powder load handling capability


• Low cost of ownership relative to alternative solutionsUpdate me here