Liner Pro: A Next‑Generation Liner Designed to Deliver Superior Performance, Longer Service Life, and a Lower Total Cost of Ownership.
Made from high performance and corrosion‑resistant materials, Liner Pro is significantly more robust and reusable, with a component life up to 3x longer than conventional burner liners. Designed to withstand extreme heat, it efficiently directs heat into the burner chamber while keeping the outer surface cooler, resulting in less powder buildup and easier, faster cleaning.
With enhanced durability, fewer unplanned stoppages, and extended reuse capability, Liner Pro represents a major advancement in abatement technology. Liner Pro can be seamlessly incorporated into an Edwards core service plan, providing genuine parts on an agreed maintenance schedule. With no need to hold spare inventory, customers reduce administrative burden, order costs, shipping, and handling. This delivers a smarter, more sustainable solution for today’s semiconductor manufacturing environments.
- COST-SAVING
- OPERATIONAL RELIABILITY
- SUSTAINABILITY
Reduced operational costs by simplifying service and lowering inventory requirements. One Liner Pro is equivalent to at least three burner liners; fabs benefit from fewer replacements and reduced spare‑parts consumption. This longer operating life, coupled with fewer changeouts and improved overall efficiency, contributes to a lower total cost of ownership for abatement systems.
Designed with a durable, corrosion‑resistant design minimizes damage risk and withstands high‑temperature abatement conditions. Its improved reliability helps reduce unplanned downtime, and maintenance stays predictable with full cleaning completed in just 30 minutes. With direct drop‑in compatibility across existing burner sizes (6x7, 6x6, 3x7, 3x6) and all legacy 12" liners, upgrades are seamless with no process changes required.
Their reusable design significantly reduces material waste throughout its service life, helping fabs lower the number of liners they discard each year. Its fully recyclable metallic construction supports circular‑economy goals and enables responsible end‑of‑life handling. By reducing the volume of liners that would have needed to be used, Liner Pro delivers a noticeably lower environmental impact while supporting broader sustainability and compliance targets.
REDUCES COST OF OWNERSHIP
REDUCES PREVENTATIVE MAINTENANCE COSTS
REDUCES CUSTOMER DOWNTIME RISKS
The new Liner Pro from Edwards has made a noticeable difference in our maintenance routine. It is easy to clean and fits right into our existing schedule without causing any delays. The installation was seamless, and we have appreciated the improved durability and reliability.
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