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    • About Edwards
    • Edwards Haverhill Facility

    Our Facility

    At Product Company Haverhill, we play a critical role in the Edwards global R&D and production capability for customers in the semiconductor market. Opened in 2023, our state-of-the-art 136,000 square foot facility in Massachusetts is home to R&D, manufacturing and warehousing for our cryogenic pump and chiller business.

    Our team is working on some exciting technologies, innovative ways to increase production capacity, and effective cost-saving measures to better the environment. We hope to provide solutions and inspiration for other facilities, with an open invitation to partner with other Edwards and Atlas Copco entities in developing new technologies for the future.

    View from above of the Haverhill production floor, with a view of the piping and workcells
    Aerial photo of the Haverhill production center showing the building, parking lot, and trees around the facility.

    Our Products

    The products produced by Edwards Haverhill are crucial to the manufacturing of the expanding global semiconductor industry and leading engineering markets.

    CTI-Cryogenic Pumps & Compressors:  From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the standard for cryogenic high-vacuum technology.

    Polycold Chillers:  Polycold cryochillers are closed loop cryogenic refrigeration systems that provide up to 4,000 watts of cooling power with temperatures as low as -200 C. They can be used to condense water vapor within a vacuum process to significantly improve pump down time and vacuum quality. Polycold products can also be used in direct cooling applications like cooling electro-static chucks used in semi-conductor production or cooling various sensor technologies for improved signal capture.

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