nHT series Diffusion Pumps Brochure
Diffusion Pumps
Next generation high throughput diffusion pumps
The ideal solution for demanding industrial applications
The nHT series offers superior vacuum performance. The pumps have been designed for optimum heat transfer into the oil resulting in faster heat up times with a significant reduction in energy consumption.
Performance Stability
The optimised pumping speed and stable high throughput is ideal for the critical Coating, Metallurgy, Heat Treatment and R & D applications.
Reliability and increased productivity
The smart temperature control and on board sensors ensure minimum load with longer lifetime for heaters and oil. The non-wear components and easy-change heater cartridges ensure extended intervals between service and maintenance.
Energy Efficiency Controller
The Energy Efficiency Controller enables ease of use and operating convenience along with effective monitoring with USB and Ethernet interface. The innovative heating design provides a faster warm up time and enables up to 30% energy savings.
- Technical Specifications
- Knowledge & Insight
| nHT10 | nHT16 | nHT20 | nHT32 | nHT35 | |||||||
| ANSI | ISO | ANSI | ISO | ANSI | ISO | ANSI | ISO | ANSI | ISO | ||
| Inlet connection | 10˝ ANSI | 320 ISO-K | 16˝ ANSI | 500 ISO-K | 20˝ ANS | 630 ISO-K | 32” ANSI | 800 ISO-F | 35˝ ANSI | 1000 ISO-F | |
| Backing connection | 2˝ ANSI | 63 ISO-K | 3” ANSI | 100 ISO-K | 4˝ ANSI | 160 ISO-K | 6” ANSI | 200 ISO-K | 6” ANSI | 200 ISO-K | |
| Pumping speed* Nitrogen <10-4 mbar |
l/s | 3,000 | 6,800 | 10,000 | 21,000 | 30,000 | |||||
| Pumping speed Argon <10-4 mbar |
l/s | 2,750 | 6,350 | 9,000 | 18,000 | 26,000 | |||||
| Pumping speed Helium <10-4 mbar |
l/s | 4,500 | 9,500 | 17,000 | 30,000 | 42,000 | |||||
| Gas throughput | mbar l/s | 8 | 11 | 17 | 36 | 36 | |||||
| Operating range | mbar | < 10-1 to 10-7 | < 10-1 to 10-7 | < 10-1 to 10-7 | <10‐2 to 10‐7 | < 10-2 to 10-7 | |||||
| Ultimate pressure (Edwards 704) |
mbar | < 5 x 10-7 | < 5 x 10-7 | < 5 x 10-7 | < 10‐6 | < 10-6 | |||||
| Critical backing pressure (Edwards 704) |
mbar | 5 x 10-1 | 5 x 10-1 | 5 x 10-1 | 5 x 10-1 | 5 x 10-1 | |||||
| Heating power | kW | 3.6 | 7.2 | 10.8 | 21.6 | 21.6 | |||||
| Heating cartridges | qty | 3 | 6 | 9 | 18 | 18 | |||||
| Warm-up period | min | < 15 | < 15 | < 25 | < 25 | < 25 | |||||
| Weight | kg | 105 | 185 | 210 | 570 | 720 | |||||
| Recommended oil | Edwards 704 | ||||||||||
| Oil | l | 3.0-4.0 | 3.5-4.5 | 5.5-7.0 | 9.0-11.0 | 9.0-11.0 | |||||
| Recommended holding pump | E2M40 | E2M40 | E2M40 | E2M80 | E2M80 | ||||||
| Recommended backing pump | nES200, E2M80, EDS200, EH1200 |
nES200, E2M175, EDS200, EH1200 |
nES300, E2M175, EDS300, EH1200 |
nES630, E2M275, GXS450, EH2600 |
nES630, E2M275, GXS450, EH2600 |
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