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Semiconductor dry pump repair

Tailored service products for semiconductor dry pumps

At Edwards we have serviced hundreds of thousands of vacuum pumps and understand both how they are manufactured and applied. Based on this experience, we have developed a suite of tailored service products which allow you to choose the level of service that is required for your process.

By choosing the service that you need, you can be sure that you get the reliability you are after, whilst keeping the cost of ownership of your pump down to a minimum. 

Service solutions options

Solution 1 - Market leading service solution: Eliminating risk, process continuity is critical

Solution 2 - Our benchmark service solution: OEM assured, driving your total cost of ownership down

Solution 3 - A contract based environmentally-sensitive service solution: cost effective and sustainable (only applicable upon contract agreement)

For more information, please download our Service Solutions data sheet.