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Our onsite engineers can support you with all activities needed on the machines in your vacuum and abatement system to make your operation seamless, and avoid tool downtime and wafer loss, enabling your Fab to reach the highest level of productivity. This includes regular maintenance, troubleshooting, to more complex or emergency repairs.
Edwards has developed a range of upgrades to improve your machine performance and, increase the equipment lifetime, and boost the productivity of your operation.
Edwards has developed analytical algorithms according to customers’ specific requirements, which are used with our advanced domain expertise to give guidance, enabling the Clean Room and SubFab teams to align maintenance activity to keep Fab productivity optimised.
Our service plan packages are designed to accommodate the different needs of our customers, from a basic plan to a total risk management solution, to reduce the risk related to unexpected events that can impact your productivity.
Our Risk Management solution packages are designed to reduce the risk and uncertainty associated with unplanned vacuum and abatement downtimes. This advanced service solution is tailored to your needs through the application of Smart Manufacturing Technology and Predictive Maintenance.