Your browser is not supported

You are using a browser we do not support any longer. To continue visiting our website, please choose one of the following supported browsers.


See where you have been blind before

Edwards Process Gas Analyzer -  Real time process control for Semiconductor applications

iTrap® is a compact, highly sensitive ion trap Fourier Transform mass spectrometer. It is an ideal tool for process analysis and inline process control. It can be used in R&D and production environments. iTrap supports you reliably in detecting the smallest traces of reaction byproducts or contamination, it helps you to investigate effectiveness of cleans and analyze chamber health. A mass spectrum is measured in almost real time, and you can trace very small amounts of molecules in your process chamber. iTrap is a powerful tool in the hands of a researcher or process development engineer and can also be used as an intelligent sensor integrated and controlled by other process tool equipment.

Edwards iTrap


Edwards iTrap convinces through: 

  • Speed | Real time measurements possible, full spectrum in < 0.5 sec
  • Sensitivity | Small trace concentration measurements 
  • Compactness | Can be integrated with a process chamber. Standardized software interface ready for external chemicals. 
  • Robustness against corrosives | Inert surface, No detectors. Withstands H2, Cl, F and other aggressive chemicals  

Contact us to learn more

Click here


World-class vacuum solutions, giving you a clear edge