Liner Pro reusable burner liner reduces unplanned downtime

In the fast-paced world of semiconductor manufacturing, maintaining safe, efficient, and environmentally responsible operations is essential. Abatement systems are vital in supporting these goals. They neutralise hazardous gases produced during processes such as PECVD and thin film deposition, using inward-fired combustion chambers. As fabs strive for higher throughput within tighter budgets, traditional abatement components—particularly burner liners—are becoming a costly and unsustainable bottleneck. This is why Edwards has developed Liner Pro, a step change in liner performance.

Without effective abatement, the toxic and environmentally harmful waste gases pose serious risks to both employee safety and environmental compliance. However, the reliability and efficiency of these systems depend heavily on their components, especially burner liners. These endure extreme conditions, withstanding temperatures up to 1,000oC on the inside and 50oC on the outer face. For harsh and severe duty processes, they require frequent replacement due to their fragility and clogging by powder build-up. This leads to increased maintenance costs, operational downtime, and growing concerns around waste and sustainability.

For many fabs, burner liners are among the most expensive spare parts in their abatement systems. Their high consumption rate significantly impacts the total cost of ownership (TCoO), particularly when liners are replaced during every service interval, sometimes even before it is needed, just to avoid the risk of unplanned downtime.

The challenges include:

• No reworkability: Once a liner is used or worn, it cannot be refurbished. It must be discarded and replaced.
• Complex inventory management: Often handled reactively, leading to inefficiencies and increased administrative costs.
• Supply chain risks: Ad hoc planning can result in delays and shortages.
• Environmental impact: Disposal of used liners contributes to material waste, conflicting with sustainability goals.

As environmental regulations tighten and fabs seek more responsible practices, the need for a reusable, cost-effective solution becomes increasingly urgent.

In an industry where uptime, safety, and sustainability are paramount, upgrading to innovative solutions like Liner Pro is more than a technical improvement—it’s a strategic advantage. Whether you're looking to reduce total cost of ownership, simplify burner retrofit planning, or ensure access to genuine spare parts, Liner Pro delivers measurable value for modern fabs.