ENVIRONMENTS WHERE INNOVATION THRIVES
Maximising output and tuning Fab efficiency demands an experienced view towards equipment selection, innovative design and a savvy service approach.
Having a seamless system between the clean room and the SubFab, packed with equipment that feeds back vital information about service requirements, means you are not only geared to run longer, but are also set up to manage -out stoppages, improve wafer yield and maximise semiconductor output.
Further than smooth, day-to-day operations, you need a partner that is able to work with you to manage changes in equipment and process recipes and their impact. As your Fab elevates its performance or upgrades its technologies, be confident that Edwards is beside you, on that path.
Service Solutions to boost productivity
- Onsite Service
- Upgrades
- Smart Manufacturing Solutions
- Core Service Plans
- Advanced Service Plans
Onsite Service
Our onsite engineers can support you with all activities needed on the machines in your vacuum and abatement system to make your operation seamless, and avoid tool downtime and wafer loss, enabling your Fab to reach the highest level of productivity. This includes regular maintenance, troubleshooting, to more complex or emergency repairs.
Upgrades
Edwards has developed a range of upgrades to improve your machine performance and, increase the equipment lifetime, and boost the productivity of your operation.
Smart manufacturing solutions
Edwards has developed analytical algorithms according to customers’ specific requirements, which are used with our advanced domain expertise to give guidance, enabling the Clean Room and SubFab teams to align maintenance activity to keep Fab productivity optimised.
Core Service Plans
Our service plan packages are designed to accommodate the different needs of our customers, from a basic plan to a total risk management solution, to reduce the risk related to unexpected events that can impact your productivity.
Advanced Service Plans
Our advanced service plans are designed to reduce the risk and uncertainty associated with unplanned vacuum and abatement downtimes. This advanced service solution is tailored to your needs through the application of Smart Manufacturing Technology and Predictive Maintenance.
WANT MORE VALUE FROM YOUR VACUUM & ABATEMENT SYSTEM?
Use this online calculator to reveal your value estimation
Input the number of vacuum and equipment unplanned events (crashes) per year into this online value calculator to see how much additional value you can reclaim from improved chamber availability, reduced scrap value, and maintenance costs.
Get an immediate estimate by inputting the typical down events causing wafer scraps
Reveal the additional throughput potential
Download and share this value estimation with your team
FAQs
Common questions about service at Edwards
Read the answers to some of the most popular questions other customers have had.
Improving fab productivity
How can vacuum pump and abatement services increase fab productivity and reduce fab downtime?
By ensuring that vacuum and abatement systems operate at peak performance, fabs reduce unplanned downtime, protect critical process tools, and optimise energy use. Edwards’ services can include predictive maintenance, monitoring, and rapid response which together improve overall equipment effectiveness and throughput.
What are the risks of not properly maintaining sub-fab equipment?
Neglecting vacuum and abatement systems can lead to contamination, unplanned tool downtime, and even wafer loss. In advanced semiconductor manufacturing, a single failure in the sub-fab can jeopardise high-value wafer batches, causing significant financial and production setbacks.
Can Edwards help prevent wafer loss incidents?
Yes. In one case, Edwards helped a foundry avoid a batch wafer loss by identifying and addressing risk in the sub-fab before failure occurred. Through comprehensive monitoring and risk mitigation strategies, Edwards protects both product and process. Read the full case study.
How much tool uptime can be recovered through better vacuum and abatement management?
In one example, a customer recovered over 1,400 hours of process tool time in a year by partnering with Edwards. This was achieved by optimising system performance and removing bottlenecks in the sub-fab. Read the full case study.
How does smart manufacturing enhance the performance of vacuum and abatement systems?
Smart manufacturing integrates digital technologies, such as data analytics, real-time monitoring, and automation, to improve the reliability and efficiency of vacuum and abatement systems. Edwards’ smart solutions allow fabs to predict failures, optimise maintenance schedules, and reduce operating costs. By connecting equipment and leveraging actionable insights, smart manufacturing helps deliver higher uptime and better process control across the fab. Discover more about smart manufacturing solutions from Edwards
Can I upgrade existing vacuum equipment to improve its performance?
Yes. Edwards offers a range of upgrade solutions that enhance the efficiency, reliability, and serviceability of installed vacuum and abatement equipment. Upgrades can include hardware improvements, control enhancements, and software updates that align with evolving process demands. Explore upgrade options for your fab
How do Edwards’ services contribute to sustainability in semiconductor manufacturing?
Edwards’ solutions reduce energy consumption and optimise abatement performance, which cuts emissions and waste. This helps fabs meet sustainability targets while maintaining productivity.
What’s the first step to improve fab productivity with Edwards?
Start with a consultation. Edwards can carry out a performance assessment of your vacuum and abatement systems, identify improvement areas, and propose a roadmap tailored to your fab’s needs.
Vacuum and abatement services
What are the key benefits of Edwards’ sub-fab support services?
Key benefits include:
- Improved uptime of process tools
- Lowered total cost of ownership
- Enhanced safety and compliance
- Proactive failure prevention
- Reduced environmental impact through energy savings during operation
Can Edwards’ services be tailored to different fab types and technologies?
Absolutely. Edwards supports a wide range of fab configurations, including logic, memory, and foundry operations. Their services are scalable and adaptable to specific process toolsets, fab size, and production goals.
What service plans are available to support ongoing equipment performance?
Edwards offers flexible service plans that can be tailored to different levels of operational need. Whether you require scheduled maintenance, rapid response, or full asset management, our plans are designed to improve system uptime, lower operational risk, and optimise total cost of ownership. Compare Edwards service plans
What is the difference between standard and advanced service plans?
Advanced service plans go beyond routine maintenance. They include proactive monitoring, predictive analytics, and outcome-based support designed to deliver maximum reliability and performance. These plans are ideal for high-volume fabs seeking data-driven service models that align with production goals. Discover the benefits of advanced service plans
What support does Edwards offer in case of an emergency with a vacuum or abatement system?
Edwards provides rapid-response repairs and on-site services to minimise disruption and return systems to optimal performance quickly. Our experienced field engineers are equipped to diagnose and resolve issues on-site, helping fabs reduce tool downtime and protect throughput. Learn more about repairs and on-site service
Does Edwards provide remote monitoring and diagnostics?
Yes. Edwards’ solutions include remote system monitoring that provides real-time insights into equipment health. This enables predictive maintenance and quick resolution of issues before they escalate.