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iTrap® Process Gas Analyzers

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Image of the Edwards process gas analyser iTrap


iTrap® is a compact, highly sensitive ion trap Fourier Transform mass spectrometer. It is an ideal tool for process analysis and inline process control. It can be used in R&D and production environments. iTrap supports you reliably in detecting the smallest traces of reaction byproducts or contamination, it helps you to investigate effectiveness of cleans and analyze chamber health. A mass spectrum is measured in almost real time, and you can trace very small amounts of molecules in your process chamber. iTrap is a powerful tool in the hands of a researcher or process development engineer and can also be used as an intelligent sensor integrated and controlled by other process tool equipment.


優點

Edwards iTrap 令人信服之處在於: 

  • 速度 | 可以即時測量,全頻譜在 0.5 秒內完成
  • 靈敏度 | 微量濃度測量 
  • 精巧 | 可與製程腔體整合。標準化的軟體介面,隨時準備好用於外部化學物質。 
  • 堅固耐用,可對抗腐蝕性物質 | 惰性表面,無偵測器。可承受 H2、Cl、F 與其他侵蝕性化學品