Edwards Highlights Integrated Abatement Solutions at SEMICON® Korea

February 4, 2015

“Edwards continually strives to lower cost-of-ownership, increase productivity and enhance final product quality. As an example, we are pleased to present our integrated solutions at SEMICON Korea,” states Charles Lee, Market Sector Manager, Edwards. “Integration of the vacuum and abatement systems into one single unit, such as our EZENITH™ product family, provides numerous benefits, including: better process reliability, safer operation, faster start-up, and reduced total cost-of-ownership. In an integrated system, the best possible set-up of vacuum pumps, abatement system, exhaust pipe configuration and pipe temperature management is determined by our specialized application engineers to provide reliable, predictable performance at the lowest possible cost-of-ownership.”

In addition, this year’s product line-up includes the following range of dry pumps that offer Green Mode, in which power consumption is reduced by up to 95 percent:

  • iXL120 and iXL200 dry pumps - the smallest and lightest pumps available for load-lock and clean applications,
  • iXH dry pump - specially-designed for harsh duty manufacturing applications,
  • iXM dry pump - a low-energy use pump that offers maximum reliability and extended pump life,
  • STP maglev turbomolecular pump - the “all-in-one” solution for large volume, high-flow applications like semiconductor, FPD, LED, and solar manufacturing.

    "We're very proud to be participating in SEMICON Korea again this year and we look forward to talking to our customers about integrated sub-fab systems," said Charles Lee. “We have been designing and selling integrated vacuum and abatement systems for nearly 15 years now, and we have over 1,000 systems installed world-wide. In fact, most of our dry pumps are made in Korea and exported globally. So we have the experience that our customers can rely on.” Charles adds, “We welcome all SEMICON Korea attendees to stop by the Edwards booth #5104 and talk to our application experts about the advantages of an integrated vacuum and abatement system".

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