February 4, 2015
CRAWLEY, WEST SUSSEX, UK. (4 February 2015) – Edwards Limited will showcase its integrated vacuum and abatement solutions at SEMICON® Korea, taking place 4-6 February 2015, in Seoul.
“Edwards continually strives to lower cost-of-ownership, increase productivity and enhance final product quality. As an example, we are pleased to present our integrated solutions at SEMICON Korea,” states Charles Lee, Market Sector Manager, Edwards. “Integration of the vacuum and abatement systems into one single unit, such as our EZENITH™ product family, provides numerous benefits, including: better process reliability, safer operation, faster start-up, and reduced total cost-of-ownership. In an integrated system, the best possible set-up of vacuum pumps, abatement system, exhaust pipe configuration and pipe temperature management is determined by our specialized application engineers to provide reliable, predictable performance at the lowest possible cost-of-ownership.”
In addition, this year’s product line-up includes the following range of dry pumps that offer Green Mode, in which power consumption is reduced by up to 95 percent: