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Edwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation - known as the world standard for reliability and performance.
On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.
|On-Board Cryopump Model||4F||8||8F||10||10F||250F||400||500|
|Pumping Speeds - litres/sec.|
|Capacity - std. litre|
|Hydrogen (5x10-6 Torr)||3||17||12||24||24||16||42||45|
|Nominal Regeneration Time (cold to cold)|
|First and Second Stage||75 min||2.5 hrs||2.5 hrs||2.5 hrs||2.5 hrs||<3.3 hrs||3 hrs||<3.8 hrs|
|Second Stage||<1 hr||<1 hr||<1 hr||<1 hr||<1 hr||<1.5 hrs||<1.5 hrs||-|