The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.
Abatement
• Unique 4-stage combustion technology
• Efficient SiH4 abatement
• High H2 flow abatement capacity
• Excellent management of high flows of NF3 / F2
• High NH3 abatement capacity
• Modular design of abatement and particulate management
• 80% powder removal efficiency
Acid gas scrubbing
• Integrated wet scrubber
• Water Recirculation Unit to optimise water consumption
Powder Capture
Spectra ZW2 – water cooled abatement with particulate removal
• Modular Wet Electrostatic Precipitator (WESP)
• Removal of 99% particulate
• High powder load handling capability
• Low cost of ownership relative to alternative solutions
