Your browser is not supported

You are using a browser we do not support any longer. To continue visiting our website, please choose one of the following supported browsers.


For Flat Panel Display and Solar Cell manufacturing

Spectra meets high performance with an environmental conscience


• Unique 4-stage combustion technology

• Efficient SiH4 abatement

• High H2 flow abatement capacity

• Excellent management of high flows of NF3 / F2

• High NH3 abatement capacity

• Modular design of abatement and particulate management

• 80% powder removal efficiency

Acid gas scrubbing

• Integrated wet scrubber

• Water Recirculation Unit to optimise water consumption

Powder Capture

Spectra ZW2 – water cooled abatement with particulate removal

• Modular Wet Electrostatic Precipitator (WESP)

• Removal of 99% particulate

• High powder load handling capability

• Low cost of ownership relative to alternative solutions

Edwards environmental solutions for semiconductor manufacturing