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Empowering innovative people

In the Semiconductor, Display, Solar and LED manufacturing environments, the era of Smart Manufacturing is with us. A steady stream of applications requiring new materials and complicated process steps, is now a fact of life. The effective integration of process-critical vacuum and abatement equipment into fab operations strategies becomes paramount for rapid process development and operational excellence.

As pioneers of dry pumping technology and leaders in the field of gas abatement, we understand vacuum and abatement like no other, supporting our installed base around the world. That expertise allows us to look beyond the visible challenges, to positively impact fab operations.

Knowledge & Insights