A turbomolecular pump is a multistage axial-flow turbine in which high speed rotating blades provide compression by increasing the probability of gas moving in the pumping direction. The turbomolecular pump is optimised for molecular flow conditions and requires a suitably sized backing pump to exhaust to atmosphere.
nEXT turbomolecular pumps are built on decades of experience and are drawing from our tried and trusted EXT and STP ranges. nEXT pumps offer superior performance, reliability and end user serviceability, setting the benchmark for scientific turbomolecular pumps.
Pump sizes available offering true 85, 240, 300, 400 and we have now added 700 and 900 litres per second pumping speed performance to our nEXT family(N2). Conventional turbomolecular pump rotors are designed to deliver either high speed or high compression. To eliminate this compromise the blade arrangements on the nEXT rotor have been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression. The end result is an exceptional pumping performance for a pump of its size.
nEXT85 builds on the ever popular EXT range with increased performance, improved features and benefits, and all in a reduced footprint. Here John Wood, Product Manager Edwards, gives you an introduction to this great new turbomolecular pump.
With the nEXT730 and nEXT930, Edwards is extending the range of our market leading nEXT platform with two new larger pumps offering speeds significantly over 700 l/s and 900 l/s for nitrogen.
As well as addressing the general R&D market, where faster pumping speeds are sometimes required, these pumps are also designed to meet the requirements of the coating market and other diffuse market sectors such as Heat treatment, Furnace applications, Ebeam welding, Etch, Ion implant, Degassing and Cylinder evacuation.
With over 80,000 tried and trusted nEXT pumps produced we are now bringing higher pumping speeds and increased flexibility to new, more demanding sectors and applications. These new models extend the nEXT’s capability with inlet flange options of ISO / CF 160 and ISO / CF 200, giving pumping speeds of over 900 l/s.
Offering class leading performance along with high reliability and low cost of ownership.
| nEXT85 | nEXT240 | nEXT300 | nEXT400 | ||||
| Inlet flange | DN40 | DN63 ISO-K or DN63CF | DN100 ISO-K | DN100 ISO-K or DN100CF | DN100 ISO-K or DN100CF | DN160 ISO-K or DN160-CF | |
| Inlet Pumping Speed ls-1 | N2 | 47 | 84 | 84 | 240 | 300 | 400 |
| Ar | 44 | 80 | 80 | 230 | 280 | 380 | |
| He | 61 | 78 | 80/78 (D/H) | 230 | 340 | 390 | |
| H2 | 49/44 (D/H) | 60/54 (D/H) | 60/54 (D/H) | 165 | 280 | 325 | |
| Compression Ratio (D) | N2 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 |
| Ar | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | |
| He | 8 x 106/2 x 107 (D/H) | 3 x 105 | 1 x 106 | 1 x 108 | |||
| H2 | 2 x 105/5 x 105 (D/H) | 1 x 104 | 5 x 104 | 5 x 105 | |||
| Compression ratio (T/H) | N2 | >1 x 1011 | >1 x 1011 | >1 x 1011 | |||
| He | 1 x 106 | 3 x 106 | >1 x 108 | ||||
| H2 | 1.5 x 104 | 1 x 105 | 1 x 106 | ||||
| nEXT730D | nEXT930D | |||
| ISO-K 160 | CF 160 | ISO-K 200 | CF 200 | |
| Main inlet pumping speed |
||||
| N2 ls-1 | 730 | 925 | ||
| He ls-1 | 820 | 905 | ||
| H2 ls-1 | 715 | 735 | ||
| Ar ls-1 | 665 | 865 | ||
| Peak compression ratio from the backing port to the main inlet port | ||||
| N2 | >1x1011 | >1x1011 | ||
| He | 1.2X108 | 1.2X108 | ||
| H2 | 4X106 | 4X106 | ||
| Ar | >1x1011 | >1x1011 | ||
| Ultimate pressure (mbar) (CF) | 3.0X10-10 | 3.0X10-10 | ||
| Weight (kg) | 14.6 | 19.6 | 15.4 | 21.7 |
| Throughput at full speed: | ||||
| N2 | 14 | 14 | ||
| He | 21 | 21 | ||
| H2 | >14 | >14 | ||
| Ar | 3.5 | 3.5 | ||
| nEXT85 | nEXT240 | nEXT300 | nEXT400 | ||||
| Inlet flange | DN40 | DN63 ISO-K or DN63CF | DN100 ISO-K | DN100 ISO-K or DN100CF | DN100 ISO-K or DN100CF | DN160 ISO-K or DN160-CF | |
| Inlet Pumping Speed ls-1 | N2 | 47 | 84 | 84 | 240 | 300 | 400 |
| Ar | 44 | 80 | 80 | 230 | 280 | 380 | |
| He | 61 | 78 | 80/78 (D/H) | 230 | 340 | 390 | |
| H2 | 49/44 (D/H) | 60/54 (D/H) | 60/54 (D/H) | 165 | 280 | 325 | |
| Compression Ratio (D) | N2 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 |
| Ar | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | >1 x 1011 | |
| He | 8 x 106/2 x 107 (D/H) | 3 x 105 | 1 x 106 | 1 x 108 | |||
| H2 | 2 x 105/5 x 105 (D/H) | 1 x 104 | 5 x 104 | 5 x 105 | |||
| Compression ratio (T/H) | N2 | >1 x 1011 | >1 x 1011 | >1 x 1011 | |||
| He | 1 x 106 | 3 x 106 | >1 x 108 | ||||
| H2 | 1.5 x 104 | 1 x 105 | 1 x 106 | ||||
| nEXT730D | nEXT930D | |||
| ISO-K 160 | CF 160 | ISO-K 200 | CF 200 | |
| Main inlet pumping speed |
||||
| N2 ls-1 | 730 | 925 | ||
| He ls-1 | 820 | 905 | ||
| H2 ls-1 | 715 | 735 | ||
| Ar ls-1 | 665 | 865 | ||
| Peak compression ratio from the backing port to the main inlet port | ||||
| N2 | >1x1011 | >1x1011 | ||
| He | 1.2X108 | 1.2X108 | ||
| H2 | 4X106 | 4X106 | ||
| Ar | >1x1011 | >1x1011 | ||
| Ultimate pressure (mbar) (CF) | 3.0X10-10 | 3.0X10-10 | ||
| Weight (kg) | 14.6 | 19.6 | 15.4 | 21.7 |
| Throughput at full speed: | ||||
| N2 | 14 | 14 | ||
| He | 21 | 21 | ||
| H2 | >14 | >14 | ||
| Ar | 3.5 | 3.5 | ||
