The IS cryopump systems leverage innovative high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency.
A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver highest uptime, best productivity, and lowest overall cost of ownership of any cryopump systems available today, backed by the Brooks highly responsive global service and support network.
The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today’s Ion Implant processes, provides enhanced hydrogen pumping speed and capacity while maintaining all the quality, performance and reliability benefits you’ve come to expect from the On-Board® IS 320FE cryopump.
The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy effi ciency, consistent performance and low cost of ownership you’ve come to expect from the On-Board® IS.