On-board Cryopumps

world standard for reliability and performance

World standard for reliability and performance

Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.

Key Features

 
  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An  embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation