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Edwards On-board Cryopump

On-board Cryopumps

World standard for reliability and performance

Accelerate integration and improve system operation

On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.

 

Key Features

  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation

On-Board Cryopump Model 4F 8 8F 10 10F 250F 400 500
Pumping Speeds - litres/sec.
Water Vapour 1,100 4,000 4,000 9,000 9,500 6,500 17,500 30,000
Air 370 1,500 1,500 3,000 3,600 2,200 6,000 10,000
Hydrogen 370 2,500 2,200 5,000 6,000 3,200 12,000 12,000
Argon 310 1,200 1,200 2,500 3,000 1,800 5,000 8,400
Capacity - std. litre
Argon 210 1,000 1,000 2,000 2,000 1,000 2,500 6,000
Hydrogen (5x10-6 Torr) 3 17 12 24 24 16 42 45
Nominal Regeneration Time (cold to cold)
First and Second Stage 75 min 2.5 hrs 2.5 hrs 2.5 hrs 2.5 hrs <3.3 hrs 3 hrs <3.8 hrs
Second Stage <1 hr <1 hr <1 hr <1 hr <1 hr <1.5 hrs <1.5 hrs -