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Edwards On-board Cryopump

On-board Cryopumps

World standard for reliability and performance

Accelerate integration and improve system operation

On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.

 

Key Features

  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation

Other cryopumps in the Edwards CTI-Cryogenics range