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Edwards' MaxCool Cryochillers range

MaxCool Cryochillers

Designed to address challenges

Achieve lower vacuum levels quickly

These cryochillers can be used to capture water vapour and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool Cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing. The different models in our range provide 2,000, 2,500 or 4,000 watts of cooling.

Water Vapour Pumping

Water vapour is typically the most reactive contaminant present in high vacuum systems. With our MaxCool Cryochillers you can expect an increase in product throughput in your existing system of 20% to 100% and improve quality of deposition.

The MaxCool Advantage

  • High-vacuum pumpdown time cut by up to 75%
  • Increased product throughput of 20% to 100%
  • Lower water vapour partial pressure during processing for higher film quality, better adhesion and more reproducible deposition
  • Superior in cost/performance to liquid nitrogen cooled Meissners
  • Minimise cost of ownership with power management
  • High capacity cooling and heating for a wide variety of processes

Edwards Polycold MaxCool Cryochiller

When added to your vacuum system, MaxCool Cryochillers can dramatically reduce pumpdown times and increase product throughput. The MaxCool will pump water vapour within minutes from start and can defrost in less than four minutes, giving true fast-cycle capability. It also has an option called Rapid Cool to Cool, which eliminates the waiting period after defrost, enabling your system to perform more production cycles per shift.

Using patented Polycold® refrigerant mixtures, our MaxCool Cryochillers work on the principle of Meissner trapping. Water vapour is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves and baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a high vacuum valve.

MaxCool Cryochillers are the most cost-effective upgrade that you can add to any diffusion-pumped, turbopumped, or helium-cryopumped system.

MaxCool Cryochillers are compliant with European Application Refrigerants (EC 1005/2009), the Montreal Protocol and the US EPA SNAP.

Benefits

  • Increased productivity with rapid cool to cool option
  • Option for power management to minimize cost of ownership
  • Temperature control
  • Patented Green refrigerant charge is globally compliant, non-toxic and non-flammable
  • Based on Polycold®’s proven, innovative, dependable mixed gas refrigeration
  • Compliant to EU PED and MD
  • TUV Rheinland Listed to NRTL/CANADA Safety Standards
  • ISO 9001:2008 certified manufacturer

MaxCool models specifications

 

MaxCool 2000

MaxCool 2500L

MaxCool 4000H

Maximum Cooling Capacity

2,000 W

2,500 W

4,000 W

Temperature at Maximum Cooling Capacity

-111 °C

-120 °C

-98 °C

Coldest Temperature

-142 °C

-145 °C

-133 °C

Ultimate Operating Pressure (25% of max pumping speed)

3E-9 torr

8E-10 torr

5E-8 torr

Typical Cold Trap Area

1.1 m2

1.4 m2

2.2 m2

Maximum Water Vapor Pumping Speed from Typical Cold Trap Area

163,900 l/s

208,600 l/s

327,800 l/s

Conservative Maximum Cold Trap Area*

1.5 m2

2.0 m2

2.8 m2

Electrical Consumption (Standby Mode)

5.5 kW

11.4 kW

12.0 kW

Electrical Consumption (Cool Mode, Typical Load)

6.2 kW

13.9 kW

12.4 kW

Electrical Consumption (Cool Mode, Max Load)

8.8 kW

19.2 kW

19.2 kW

Cooling water flow for 13 °C

6.8 l/min

15.1 l/min

15.1 l/min

Cooling water flow for 18 °C

9.1 l/min

18.2 l/min

18.2 l/min

Cooling water flow for 24 °C

13.6 l/min

27.3 l/min

27.3 l/min

Cooling water flow for 29 °C

27.6 l/min

54.1 l/min

54.1 l/min

European PED-Compliant

Yes

Yes

Yes

Nontoxic Refrigerants

Yes

Yes

Yes

Non-flammable Refrigerants

Yes

Yes

Yes

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