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Edwards Residual Gas Analysers

The perfect balance of high end performance and accessibility

Do you have the right Residual Gas Analyser to monitor the quality of your vacuum?

Unsure? How about discussing the matter with an expert?

All are equipped with a dedicated software allowing you to track your process in  real-time and do detailed analysis of up to 16 different units.

For a quick snapshot view, the units have an on-board display to see the main gas types & overall pressure of your system

PRA primary gas analyser

Delivering the perfect balance of high end performance and accessibility.

  • Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range.
  • The PRA is the perfect starting point for analysing your processes.

 

RGA gas analyser

WRA wide range residual gas analyser

Top of the line models, with market leading specifications.

  • Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes.
  • This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements.
Residual Gas Analyser RGA, WRG, PRA
Total pressure measurement

for full process control

Dual filament

for highest reliability and up-time

On unit display

for basic measurements without a PC

Customer replaceable parts
Degas function
Protection of Ion source and EM
Semiconductor processes

High energy physics

Research & development
Vacuum freeze drying
Thin-film and display
Vacuum heat treatment

Request your free consultation now!