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Edwards CTI-Cryogenics On-Board® IS 320F XVS  Cryopump

On-Board® IS 320F XVS Cryopump Q&A with Paul Amundsen

 

Q: Hi Paul – first of all, could you please tell us something about yourself and your story at Edwards?

A: I am currently the Strategic Product Manager for the Edwards cryogenic products. I have worked in the cryogenic/vacuum industry for more than 40 years; I hold numerous patents in the area of cryogenic vacuum pumps and received a B.S. Electrical Engineering from the University of Massachusetts.

Q: The last 18 months have been difficult for our industry. What were the biggest challenges during the development and production of the new On-Board® IS 320F XVS Cryopump, and how did you overcome them?

A: Like most of the industry, we were confronted with learning how to effectively work remotely. Developing a product is a very collaborative process and doing so remotely was expected to be a challenge. We were able to overcome this by using the latest online collaborative meeting platforms, which were the vehicle that drove our product development and product release forward.

Q: What does the On-Board® IS 320F XVS Cryopump add to the existing range, and how does it increase customer productivity?

Paul Amundsen

Paul Amundsen

A: Our new cryopump was designed to maintain stable consistent vacuum performance between regenerations and over the lifetime of the pump. Providing a stable process vacuum is consistent with improved process yield. Together with the highest hydrogen pumping speed, it makes it the perfect choice for the most demanding ion implant applications. Edwards has a reputation for designing the highest performing and reliable implant cryopumps on the market, and I think this new product demonstrates the case.

Q: How does it perform in terms of user controls?

A: The key to this answer is in the cryopump’s name: IS stands for “Intelligent System”. The control system ensures process quality and vacuum consistency by utilising real-time adaptive control to optimise cryopump vacuum performance in response to changing process conditions.

Edwards has a reputation for designing the highest performing and reliable implant cryopumps on the market, and I think this new product demonstrates the case.

Paul Amundsen

Q: Can you please tell us something about its compatibility? 

A: The On-Board® IS 320F XVS is the latest offering to the On-Board®IS Cryopump system family. This new cryopump is designed to be 100% compatible with all existing Edwards CTI-Cryogenics On-Board® IS cryopumps, controllers and compressors.

Q: Last, but not least, could you please tell us something about the On-Board® IS 320F XVS Cryopump’s environmental impact?

A: Edwards is committed to providing products that reduce impact to the environment, and the On-Board® IS 320F XVS cryopump is no exception. By using our new cryopump together with an On-Board IS variable speed helium compressor, customers can expect a reduction in energy consumption of up to 44% compared to usage with fixed speed helium compressors.

 

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