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Specifically designed to safely remove hazardous gases from vacuum pump exhausts on semiconductor processes.
The GRC is a unique hot bed reactor that chemically destroys toxic gases. It treats the widest range and mixture of gases in one system without creating new effluent disposable problems. A proprietary mixture of inorganic granules is held within a welded stainless steel cartridge. This is maintained at an elevated temperature by insertion in a tubular electrical heater. Hazardous exhaust gases passing into the cartridge are chemically reacted to completion and converted into insert stable inorganic salts.