Achieve lower vacuum levels quickly
Edwards Polycold® MaxCool Cryochillers are closed loop cryogenic refrigeration systems that effectively capture water vapour, which comprises 65% to 95% of the residual gas in high vacuum systems.
These cryochillers can be used to capture water vapour and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool Cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing. The different models in our range provide 2,000, 2,500 or 4,000 watts of cooling.
Water Vapour Pumping
Water vapour is typically the most reactive contaminant present in high vacuum systems. With our MaxCool Cryochillers you can expect an increase in product throughput in your existing system of 20% to 100% and improve quality of deposition.
The MaxCool Advantage
- High-vacuum pumpdown time cut by up to 75%
- Increased product throughput of 20% to 100%
- Lower water vapour partial pressure during processing for higher film quality, better adhesion and more reproducible deposition
- Rapid return on investment by eliminating the recurring cost of liquid nitrogen
- Minimise cost of ownership with power management
- High capacity cooling and heating for a wide variety of processes
When added to your vacuum system, MaxCool Cryochillers can dramatically reduce pumpdown times and increase product throughput. The MaxCool will pump water vapour within minutes from start and can defrost in less than four minutes, giving true fast-cycle capability. It also has an option called Rapid Cool to Cool, which eliminates the waiting period after defrost, enabling your system to perform more production cycles per shift. Using patented Polycold® refrigerant mixtures, our MaxCool Cryochillers work on the principle of Meissner trapping. Water vapour is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves and baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a high vacuum valve.
MaxCool Cryochillers are the most cost-effective upgrade that you can add to any diffusion-pumped, turbopumped, or helium-cryopumped system.
MaxCool Cryochillers are compliant with European Application Refrigerants (EC 1005/2009), the Montreal Protocol and the US EPA SNAP.
Benefits
- Increased productivity with rapid cool to cool option
- Option for power management to minimize cost of ownership
- Temperature control
- Patented Green refrigerant charge is globally compliant, non-toxic and non-flammable
- Based on Polycold®’s proven, innovative, dependable mixed gas refrigeration
- Compliant to EU PED and MD
- TUV Rheinland Listed to NRTL/CANADA Safety Standards
- ISO 9001:2008 certified manufacturer
MaxCool models specifications
|
MaxCool 2000 |
MaxCool 2500L |
MaxCool 4000H |
Maximum Cooling Capacity |
2,000 W |
2,500 W |
4,000 W |
Temperature at Maximum Cooling Capacity |
-111 °C |
-120 °C |
-98 °C |
Coldest Temperature |
-142 °C |
-145 °C |
-133 °C |
Ultimate Operating Pressure (25% of max pumping speed) |
3E-9 torr |
8E-10 torr |
5E-8 torr |
Typical Cold Trap Area |
1.1 m2 |
1.4 m2 |
2.2 m2 |
Maximum Water Vapor Pumping Speed from Typical Cold Trap Area |
163,900 l/s |
208,600 l/s |
327,800 l/s |
Conservative Maximum Cold Trap Area* |
1.5 m2 |
2.0 m2 |
2.8 m2 |
Electrical Consumption (Standby Mode) |
5.5 kW |
11.4 kW |
12.0 kW |
Electrical Consumption (Cool Mode, Typical Load) |
6.2 kW |
13.9 kW |
12.4 kW |
Electrical Consumption (Cool Mode, Max Load) |
8.8 kW |
19.2 kW |
19.2 kW |
Cooling water flow for 13 °C |
6.8 l/min |
15.1 l/min |
15.1 l/min |
Cooling water flow for 18 °C |
9.1 l/min |
18.2 l/min |
18.2 l/min |
Cooling water flow for 24 °C |
13.6 l/min |
27.3 l/min |
27.3 l/min |
Cooling water flow for 29 °C |
27.6 l/min |
54.1 l/min |
54.1 l/min |
European PED-Compliant |
Yes |
Yes |
Yes |
Nontoxic Refrigerants |
Yes |
Yes |
Yes |
Non-flammable Refrigerants |
Yes |
Yes |
Yes |
- Polycold Edwards Data Sheet Maxcool 2000 535.8 kB, PDF
- Polycold Edwards Data Sheet Maxcool 2500L 542.4 kB, PDF
- Polycold Edwards Data Sheet Maxcool 4000H 544.5 kB, PDF
- Polycold Edwards Data Sheet MaxCool Cryochillers 772.3 kB, PDF
