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  1. Edwards
  2. Our Products
  3. Product Support and Downloads
  4. EtherCAT® Interfaces
  5. EtherCAT® Interfaces – Roughing Pump
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The MicroTIM provides an EtherCAT interface for Edwards dry pumps.

For more information on installing and operating the interface please refer to the instruction manual supplied with the product.

Roughing Pump
EtherCAT MicroTIM D37363000

Description of Change
ESI File Name D37363610H.XML

Update to add 0x100B Manufacturer Bootloader Version. Update for CTT 2.1.0.
Compatible MicroTIM Firmware D37363605D
Common Device Profile ETG5003-1
CDP Functional Generation Number 2
Specific Device Profile ETG5003-2050
SDP Functional Generation Number 2
Issue Date 30th March 2017