Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment.
Each range has been specifically designed to give advantages in environmental performance, reliability in harsh conditions and agility in light duty applications.
Edwards iXM low energy series dry pumps can bring real process improvements with increased uptime, reduced environmental impact and cost benefits for your most critical applications.
The iXH dry pump range sets new standards for harsh process capability, reliability and lower cost of ownership.
The iXL series is a range of low energy compact dry pumps for light duty applications such as wafer handling, PVD, and metrology.